Elhady, Alaa and Abdel-Rahman, Eihab (2022) Measurement of the electric permittivity using Bleustein–Gulyaev wave sensor. Journal of Micromechanics and Microengineering, 32 (3). 034004. ISSN 0960-1317
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Abstract
We present a novel compact electric permittivity sensor that exploits Bleustein–Gulyaev waves propagating along the surface of shear-poled piezoelectrics. We formulate the dynamic nonlinear electromechanical partial differential equations of motion governing wave propagation under electromagnetically quasistatic conditions. The permittivity of the medium-under-test was found to influence the sensor eigenvalues, enabling the implementation of a frequency-shift permittivity sensor. Solution of the equations of motion demonstrates resonance of the first and third modes when excited using an interdigitated transducer. We fabricated two sensor prototypes on shear-poled PZT4 and LiNbO3 substrates and used a Vector Network Analyzer to observe the shift in their fundamental natural frequency in the presence of various media-under-test. S11 measurements show deterministic and repeatable shifts in the resonant frequency of the first mode of the LiNbO3 sensor measured at $\Delta f_1 = 3.51$ MHz for ethanol and $\Delta f_1 = 7.49$ MHz for deionized water where the bare surface frequency was initially at $f_1 = 25.27$ MHz.
Item Type: | Article |
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Subjects: | OA Library Press > Multidisciplinary |
Depositing User: | Unnamed user with email support@oalibrarypress.com |
Date Deposited: | 08 Jun 2023 07:33 |
Last Modified: | 14 Sep 2024 04:02 |
URI: | http://archive.submissionwrite.com/id/eprint/1141 |